集成光学陀螺技术研究进展综述

Review of the Research Progress in Integrated Optical Gyroscope Technology

  • 摘要: 当前,随着无人系统得到广泛应用,业内对高性能、微小型陀螺的需求日益迫切。集成光学陀螺作为新型微小型陀螺,结合了光学陀螺与光子集成技术优势,受到广泛关注。随着光子集成技术的迅猛发展,芯片中有源器件和无源器件的多功能集成加速了集成光学陀螺的技术突破。基于此,论述干涉型、谐振型集成光学陀螺基本原理,从集成结构、方案设计、集成工艺和材料平台等方面总结集成光学陀螺发展历程及关键技术,并分析未来技术发展趋势与方向。

     

    Abstract: With the wide application of unmanned systems, the demand for high performance and micro-miniature gyroscopes is increasingly urgent. As a new type of micro-miniature gyroscope, the integrated optical gyroscope has been widely concerned owing to the advantage of optical gyroscope and photon integration technology. With the rapid development of photonic integration technology, the multifunctional integration of active and passive components in chip accelerates the technological breakthrough of integrated optical gyroscope. Therefore, the basic principle of interferometric and resonant integrated optical gyroscope are discussed. The development history and key technologies of the integrated optical gyroscope are summarized from the aspects of integrated structure, scheme design, integrated technology and material platform, and the development trend of future technology are analyzed.

     

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