Abstract: Sensors are the foundation for robots to have human-like perception and reaction ability,which can assist them to realize internal feedback control and external environment perception.With the development of sensor technology and artificial intelligence (AI),the robots have integrated more complex sensor systems,including vision sensors,Lidar,inertial sensors and force sensors,etc.,which can complete more complex work tasks.The application scope has gradually extended from the traditional industrial field to the field of life services.The Micro-Electro-Mechanical Systems (MEMS) sensors have the advantages of small size,high precision,low power consumption and low cost,and are suitable for extreme environments,which have been widely used in the field of robotics.The development status of MEMS sensors including range sensors,inertial sensors,force/tactile sensors and olfactory sensors is reviewed,and the application and development trend of MEMS sensors in the field of robotics are discussed.In the future,the combination of MEMS sensors and AI large models can promote the innovative development and application of embodied intelligent robots.