Abstract:
Sensor manufacturing based on printing processes has significant advantages in improving material utilization, reducing material loss rates and saving costs. However, most of the existing research focuses on the development of sensors based on the sensitive material polyvinylidene fluoride-trifluoroethylene copolymer (PVDF-TrFE), without paying particular attention to the analysis and selection of substrate materials. Based on this, taking three typical flexible materials, namely PET, PI and PDMS, as the substrates, first of all, the piezoelectric responses of different substrate sensors and the strain characteristics of the piezoelectric layer are simulated and analyzed by using COMSOL software. Secondly, PVDF-TrFE array tactile piezoelectric sensors are fabricated by using the printing processes. Finally, the piezoelectric response of the sensor is tested using the PDMS-100 nanometer tribogenerator test platform, and the performance of the tactile piezoelectric sensors based on three different materials was compared and analyzed, including sensitivity, response time and adjacent electrode maximum interference voltage. The results show that the sensitivity ranking of the sensors based on three different materials is PDMS > PET > PI, the response rise time ranking is PDMS > PET≈ PI, and the adjacent electrode interference voltage ranking is PDMS > PET≈ PI. The result provides a useful reference for the selection of the substrate of tactile piezoelectric sensors.