基于印刷工艺的PVDF-TrFE阵列触觉压电传感器基底材料研究

Research on PVDF-TrFE Array Tactile Piezoelectric Sensor Substrate Materials Based on Printing Processes

  • 摘要: 基于印刷工艺的传感器制备在提高材料利用率、降低材料损耗率和节约成本方面具有显著优势。然而, 现有研究多聚焦于基于敏感材料聚偏氟乙烯-三氟乙烯共聚物(PVDF-TrFE)的传感器开发, 未重点关注基底材料的分析与选择。基于此, 以PET、PI和PDMS三种典型柔性材料为基底, 首先, 采用COMSOL软件仿真分析不同材料基底的传感器压电响应与压电层的应变特性;其次, 采用印刷工艺制备PVDF-TrFE阵列触觉压电传感器;最后, 利用PDMS-100纳米摩擦发电机测试平台测试传感器的压电响应, 并对比分析以三种不同材料为基底的触觉压电传感器性能, 包括灵敏度、响应时间和相邻电极干扰电压。结果表明, 以三种不同材料为基底的传感器灵敏度排序为PDMS > PET > PI, 响应上升时间排序为PDMS > PET≈ PI, 相邻电极最大干扰电压排序为PDMS > PET≈ PI, 该结果为触觉压电传感器基底材料的选择提供了有益参考。

     

    Abstract: Sensor manufacturing based on printing processes has significant advantages in improving material utilization, reducing material loss rates and saving costs. However, most of the existing research focuses on the development of sensors based on the sensitive material polyvinylidene fluoride-trifluoroethylene copolymer (PVDF-TrFE), without paying particular attention to the analysis and selection of substrate materials. Based on this, taking three typical flexible materials, namely PET, PI and PDMS, as the substrates, first of all, the piezoelectric responses of different substrate sensors and the strain characteristics of the piezoelectric layer are simulated and analyzed by using COMSOL software. Secondly, PVDF-TrFE array tactile piezoelectric sensors are fabricated by using the printing processes. Finally, the piezoelectric response of the sensor is tested using the PDMS-100 nanometer tribogenerator test platform, and the performance of the tactile piezoelectric sensors based on three different materials was compared and analyzed, including sensitivity, response time and adjacent electrode maximum interference voltage. The results show that the sensitivity ranking of the sensors based on three different materials is PDMS > PET > PI, the response rise time ranking is PDMS > PET≈ PI, and the adjacent electrode interference voltage ranking is PDMS > PET≈ PI. The result provides a useful reference for the selection of the substrate of tactile piezoelectric sensors.

     

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