基于机器视觉的半导体键合引线缺陷检测方法综述

Review of Machine Vision-based Defect Detection Methods for Semiconductor Bonding Wires

  • 摘要: 随着集成电路产业的高速发展,键合引线作为芯片封装中连接内部电路的关键部件,其质量直接影响电子产品的可靠性和稳定性。传统的键合引线缺陷检测方法主要包括机械参数检测、电学参数检测和形貌特征检测三大类,虽然具有一定的适用性与代表性,但普遍存在检测精度不足、自动化程度低、难以满足复杂缺陷识别需求等问题。近年来,随着机器视觉与深度学习技术的快速发展,基于图像处理与神经网络的自动化缺陷检测方法逐渐成为研究热点。首先,系统梳理二维深度学习、三维点云分析、图像-点云融合等多种先进检测方法;其次,比较典型算法的检测性能与适用场景;最后,重点分析YOLO系列模型及三维深度学习架构在实际检测中的应用潜力,旨在为相关研究人员提供系统化的技术概览与参考,推动高精度、智能化缺陷检测技术在半导体封装中的深入应用。

     

    Abstract: With the rapid development of the integrated circuit industry, bonding leads, as key components connecting internal circuits in chip packaging, their quality directly affects the reliability and stability of electronic products.The traditional methods for detecting bonding lead defects mainly include three categories:mechanical parameter detection, electrical parameter detection and morphological feature detection.Although they have certain applicability and representativeness, they generally have problems such as insufficient detection accuracy, low degree of automation and difficulty in meeting the requirements of complex defect identification.In recent years, with the rapid development of machine vision and deep learning technologies, automated defect detection methods based on image processing and neural networks have gradually become a research hotspot.Firstly, systematically sort out various advanced detection methods such as 2D deep learning, 3D point cloud analysis, and image-point cloud fusion.Secondly, compare the detection performance and applicable scenarios of typical algorithms.Finally, the application potential of the YOLO series models and the 3D deep learning architecture in actual detection is analyzed emphatically, aiming to provide a systematic technical overview and reference for relevant researchers and promote the in-depth application of high-precision and intelligent defect detection technology in semiconductor packaging.

     

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